XY motorized stage

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XY Motorized stage for Thin Film Uniformity Mapping

The XY motorized stage provides automated stage movement for sample mapping. Additional features such as CCD camera monitoring combined with the integrated microspot optics delivers the ideal solution for accurate characterization of patterned wafers.

In option for UVISEL and Smart SE.
In standard for UVISEL 2 and Auto SE.


If you want more information about Spectroscopic Ellispometry, please visit our website on Spectroscopic Ellipsometry - HORIBA and on Spectroscopic Ellipsometer Options and Accessories - HORIBA.

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