Anode: The anode surface can accumulate debris or deposits from the sputtering process. Regular cleaning is crucial to maintain a smooth and conductive surface. Inspect it periodically for signs of wear, erosion, or discoloration. If the anode surface becomes pitted or deformed, it should be replaced.
Cathode: Ceramic cathodes can accumulate residues from sputtering. It’s important to clean these deposits regularly to avoid interference with the plasma formation. If the ceramic cathode shows any visible cracks, fractures, or chips, it should be replaced immediately.
O-rings: Inspect the O-rings regularly for signs of wear, cracking, or degradation, as even a small leak can destabilize the plasma. O-rings should be replaced if they show any signs of wear, cracking, or deformation.
