25mmx25mm nanoGPS scale for Scanning Electron Microscopy (SEM) + 1 licence of OxyO software.
Position Sensing with nanoGPS OxyO
Conductive Si substrate and Au/Cr patterns provide excellent contrast when observed on a SEM. These scales allow the determination of SEM stages accuracy, reproducibility, straightness, orthogonality, with an unprecedent accuracy . They open the way to fully automated calibration procedures of SEM stages.