25mmx25mm nanoGPS scale for Scanning Electron Microscopy (SEM) + 1 licence of OxyO software.
Reference: OxyO-Si2.5-E10-SEM
Position Sensing with nanoGPS OxyO
Conductive Si substrate and Au/Cr patterns provide excellent contrast when observed on a SEM. These scales allow the determination of SEM stages accuracy, reproducibility, straightness, orthogonality, with an unprecedent accuracy [3]. They open the way to fully automated calibration procedures of SEM stages.
More information about Performance and Requirements.
