Diamond file for lower electrode cleaning
The diamond coating provides extremely hard and abrasive properties, allowing it to effectively remove contaminants or imperfections from the surface of the lower electrode without causing damage to the underlying material.
These diamond files are used in a controlled manner by trained technicians or engineers to perform maintenance and cleaning tasks on lower electrodes, ensuring their optimal performance and longevity in semiconductor manufacturing processes. Proper cleaning and maintenance of lower electrodes are essential for achieving consistent and high-quality results.
Maintenance and replacement:
- Store the diamond file in a clean, dry environment to prevent it from becoming contaminated with dust or moisture.
- Use the file only for its intended purpose—cleaning the lower electrode—and avoid using it on materials for which it’s not designed.
- Clean the diamond file regularly to remove metal particles or other debris that can accumulate on the abrasive surface during the cleaning of the lower electrode.
- Use a soft brush or compressed air to remove particles after each use.
- Regularly inspect the file for signs of wear. If the diamond grit appears to be worn down or the file no longer cleans the electrode effectively, it may need to be replaced.
Compatibility:
If you want more information about Carbon Sulfur and Oxygen/Nitrogen/Hydrogen Analyzers please visit our website on Measurement Principle - Carbon/Sulfur Analysis - HORIBA
