XY Motorized stage for Thin Film Uniformity Mapping
The XY motorized stage provides automated stage movement for sample mapping. Additional features such as CCD camera monitoring combined with the integrated microspot optics delivers the ideal solution for accurate characterization of patterned wafers.
In option for UVISEL Plus
Proper maintenance and timely replacement of components are crucial to ensure optimal performance and longevity of the equipment.
Maintenance and replacement:
- Keep the stage clean and free from dust and debris.
- Regularly inspect cables and connectors for signs of wear or damage. Over time, cables can become brittle and connectors can corrode or wear out. Replace any cables or connectors showing signs of damage to prevent intermittent issues.
- Check the alignment and calibration of the stage to ensure accuracy.
- Look for any unusual noises or resistance during operation which might indicate mechanical issues. If the motorized stage is not moving correctly or the motor is making unusual noises, it may need replacement.
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Perform routine calibration to maintain the accuracy of the stage movements.
Compatibility:
If you want more information about Spectroscopic Ellispometry, please visit our website on Spectroscopic Ellipsometry - HORIBA and on Spectroscopic Ellipsometer Options and Accessories - HORIBA.
